首页|多孔n-GaN/p-ZnxCu1-xS异质结的制备及紫外探测性能研究

多孔n-GaN/p-ZnxCu1-xS异质结的制备及紫外探测性能研究

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本文首先采用紫外光辅助电化学刻蚀(UV-EC)方法制备出了孔隙密度为1。51 ×1010 cm-2、平均孔径为38 nm的多孔n-GaN薄膜;随后在其上通过水浴法沉积了一系列ZnxCu1-xS复合薄膜,x为0。0、0。2、0。4、0。6、0。8、1。0,形成的多孔n-GaN/p-ZnxCu1-,S异质结带隙在2。34~3。51 eV调控;最后基于这些异质结构建出p-n结型紫外探测器。I-V曲线结果表明这些探测器均具有良好的整流特性,特别是n-GaN/p-Zn0。4 Cu0。6 S探测器性能最优。在暗态下,I+3V/I-3V约为1。78 × 105;在偏压为-3 V、光功率密度为432 µW/cm2(365 nm)的条件下,光暗电流比超过103,上升/下降时间为0。09/39。8 ms,响应度(R)为0。352 A/W,外量子效率(EQE)为119。6%,探测率(D*)为3。21 × 1012 Jones。I-t曲线结果表明,多孔n-GaN/p-ZnxCu,-xS异质结紫外探测器在连续开-关光循环过程中拥有稳定的光电流响应。该研究为制备异质结紫外探测器提供了一定的理论指导和实验数据。
Preparation and Ultraviolet Detection Performance Study of Porous n-GaN/p-ZnxCu1_xS Heterojunctions
In this paper,porous n-GaN thin films with a pore density of 1.51 × 1010 cm-2 and an average pore size of 38 nm were initially prepared by UV-assisted electrochemical etching(UV-EC).Subsequently,a series of ZnxCu1-xS composite films,with x values of 0.0,0.2,0.4,0.6,0.8 and 1.0,were deposited on the porous n-GaN films by water bath method.The bandgaps of the porous n-GaN/ZnxCu1-xS heterojunctions varied in the range from 2.34 eV to 3.51 eV.Hall test results demonstrate that when x values is less than 1,the Znx Cu1-xS composite films exhibit p-type semiconductor properties.Furthermore,increasing the proportion of CuS leads to an improvement in the conductivity of the composite films.Additionally,XPS results confirm that both Cu and Zn possess a+2 valence within the composite films.When ZnxCu1-xS forms a heterojunction with porous n-GaN,the energy band structures of both materials interact to create a built-in electric field.This field facilitates the efficient separation of photogenerated electron-hole pairs.Finally,p-n heterojunctions UV detectors were constructed based on these heterostructures.The I-V curve results indicate that these detectors exhibit good rectification characteristics.Notably,the n-GaN/p-Zn0.4Cu0.6S detector demonstrates optimal performance.In the dark state,I+3V/I-3V is approximately 1.78 × 105.Under a bias voltage of-3 V and an optical power density of 432 μW/cm2(ultraviolet light at 365 nm),this detector's photo-to-dark current ratio exceeds 103,the rise/fall time is 0.09/39.8 ms,responsivity®reaches 0.352 A/W,the external quantum efficiency(EQE)stands at 119.6%,and detectivity(D*)is 3.21 × 1012 Jones.The I-t curve results indicate that the porous n-GaN/p-ZnxCu1-xS heterojunctions UV detector possesses reproducible performance during the consecutive on-off optical cycling process with reproducible photocurrent response.This study offers valuable theoretical insights and a comprehensive understanding of the physical properties and performance characteristics of these novel heterostructures UV detectors.

p-ZnxCu1-xSporous n-GaNheterojunctionultraviolet detectorphoto-to-dark current ratioresponsivity

杜志伟、贾伟、贾凯达、任恒磊、李天保、董海亮、贾志刚、许并社

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太原理工大学新材料界面科学与工程教育部重点实验室,太原 030024

山西浙大新材料与化工研究院,太原 030024

陕西科技大学材料原子·分子科学研究所,西安 710021

p-ZnxCu1-xS 多孔n-GaN 异质结 紫外探测器 光暗电流比 响应度

山西浙大新材料与化工研究院山西省重点研发计划项目山西省自然科学基金山西省重点研发项目

2021SX-AT002202302150101012201901D111109201903D111009

2024

人工晶体学报
中材人工晶体研究院

人工晶体学报

CSTPCD北大核心
影响因子:0.554
ISSN:1000-985X
年,卷(期):2024.53(8)
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