人工晶体学报2024,Vol.53Issue(8) :1326-1336.

多孔n-GaN/p-ZnxCu1-xS异质结的制备及紫外探测性能研究

Preparation and Ultraviolet Detection Performance Study of Porous n-GaN/p-ZnxCu1_xS Heterojunctions

杜志伟 贾伟 贾凯达 任恒磊 李天保 董海亮 贾志刚 许并社
人工晶体学报2024,Vol.53Issue(8) :1326-1336.

多孔n-GaN/p-ZnxCu1-xS异质结的制备及紫外探测性能研究

Preparation and Ultraviolet Detection Performance Study of Porous n-GaN/p-ZnxCu1_xS Heterojunctions

杜志伟 1贾伟 2贾凯达 1任恒磊 1李天保 1董海亮 1贾志刚 1许并社3
扫码查看

作者信息

  • 1. 太原理工大学新材料界面科学与工程教育部重点实验室,太原 030024
  • 2. 太原理工大学新材料界面科学与工程教育部重点实验室,太原 030024;山西浙大新材料与化工研究院,太原 030024
  • 3. 太原理工大学新材料界面科学与工程教育部重点实验室,太原 030024;山西浙大新材料与化工研究院,太原 030024;陕西科技大学材料原子·分子科学研究所,西安 710021
  • 折叠

摘要

本文首先采用紫外光辅助电化学刻蚀(UV-EC)方法制备出了孔隙密度为1.51 ×1010 cm-2、平均孔径为38 nm的多孔n-GaN薄膜;随后在其上通过水浴法沉积了一系列ZnxCu1-xS复合薄膜,x为0.0、0.2、0.4、0.6、0.8、1.0,形成的多孔n-GaN/p-ZnxCu1-,S异质结带隙在2.34~3.51 eV调控;最后基于这些异质结构建出p-n结型紫外探测器.I-V曲线结果表明这些探测器均具有良好的整流特性,特别是n-GaN/p-Zn0.4 Cu0.6 S探测器性能最优.在暗态下,I+3V/I-3V约为1.78 × 105;在偏压为-3 V、光功率密度为432 µW/cm2(365 nm)的条件下,光暗电流比超过103,上升/下降时间为0.09/39.8 ms,响应度(R)为0.352 A/W,外量子效率(EQE)为119.6%,探测率(D*)为3.21 × 1012 Jones.I-t曲线结果表明,多孔n-GaN/p-ZnxCu,-xS异质结紫外探测器在连续开-关光循环过程中拥有稳定的光电流响应.该研究为制备异质结紫外探测器提供了一定的理论指导和实验数据.

Abstract

In this paper,porous n-GaN thin films with a pore density of 1.51 × 1010 cm-2 and an average pore size of 38 nm were initially prepared by UV-assisted electrochemical etching(UV-EC).Subsequently,a series of ZnxCu1-xS composite films,with x values of 0.0,0.2,0.4,0.6,0.8 and 1.0,were deposited on the porous n-GaN films by water bath method.The bandgaps of the porous n-GaN/ZnxCu1-xS heterojunctions varied in the range from 2.34 eV to 3.51 eV.Hall test results demonstrate that when x values is less than 1,the Znx Cu1-xS composite films exhibit p-type semiconductor properties.Furthermore,increasing the proportion of CuS leads to an improvement in the conductivity of the composite films.Additionally,XPS results confirm that both Cu and Zn possess a+2 valence within the composite films.When ZnxCu1-xS forms a heterojunction with porous n-GaN,the energy band structures of both materials interact to create a built-in electric field.This field facilitates the efficient separation of photogenerated electron-hole pairs.Finally,p-n heterojunctions UV detectors were constructed based on these heterostructures.The I-V curve results indicate that these detectors exhibit good rectification characteristics.Notably,the n-GaN/p-Zn0.4Cu0.6S detector demonstrates optimal performance.In the dark state,I+3V/I-3V is approximately 1.78 × 105.Under a bias voltage of-3 V and an optical power density of 432 μW/cm2(ultraviolet light at 365 nm),this detector's photo-to-dark current ratio exceeds 103,the rise/fall time is 0.09/39.8 ms,responsivity®reaches 0.352 A/W,the external quantum efficiency(EQE)stands at 119.6%,and detectivity(D*)is 3.21 × 1012 Jones.The I-t curve results indicate that the porous n-GaN/p-ZnxCu1-xS heterojunctions UV detector possesses reproducible performance during the consecutive on-off optical cycling process with reproducible photocurrent response.This study offers valuable theoretical insights and a comprehensive understanding of the physical properties and performance characteristics of these novel heterostructures UV detectors.

关键词

p-ZnxCu1-xS/多孔n-GaN/异质结/紫外探测器/光暗电流比/响应度

Key words

p-ZnxCu1-xS/porous n-GaN/heterojunction/ultraviolet detector/photo-to-dark current ratio/responsivity

引用本文复制引用

基金项目

山西浙大新材料与化工研究院(2021SX-AT002)

山西省重点研发计划项目(202302150101012)

山西省自然科学基金(201901D111109)

山西省重点研发项目(201903D111009)

出版年

2024
人工晶体学报
中材人工晶体研究院

人工晶体学报

CSTPCD北大核心
影响因子:0.554
ISSN:1000-985X
参考文献量4
段落导航相关论文