Progress and Prospect of Molecular Beam Epitaxy Equipment at Home and Abroad
Molecular beam epitaxy(MBE)is an ultra-high vacuum,ultra-high precision and uniformity thin film deposition process by which to fabricate epitaxial films of solid-state microwave RF devices,semiconductor lasers and detectors,etc,and plays a fundamental role in developing compound semiconductor materials for electronics and optics.The article briefly introduces technical characteristics of the MBE equipment.Then historical development and current status of world-renowned MBE manufacturers such as Riber,Veeco,and DCA,and localization progress of MBE equipment from domestic manufacturers such as CETC48,SKY and FERMI are elaborated.Finally,future trends of MBE are expected,pointing out that it is certainly timely for substitution.To seize the opportunities and overcome the challenges,we need to promote technological innovation and industrial application of MBE equipment quickly and to provide important supports for China's scientific and technological self-reliance and self-improvement.
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维普
