VO2-SiO2复合薄膜的激光诱导损伤特性研究
Laser-Induced Damage Characteristics of VO2-SiO2 Composite Films
韩笋 1李艳1
作者信息
- 1. 中国矿业大学材料与物理学院,徐州 221116
- 折叠
摘要
本文采用溶胶-凝胶法制备了VO2和VO2-SiO2复合薄膜,并用X射线衍射仪(XRD)和紫外-可见分光光度计对薄膜的相结构和透过率进行了表征.结果表明,制备的VO2为单斜相(B),VO2-SiO2复合薄膜的XRD图谱和VO2类似,薄膜在450～800 nm的光学透过率达到了 90％以上.激光诱导损伤阈值(LIDT)测试结果显示,VO2-SiO2复合薄膜的LIDT为3.9 J/cm2,相比VO2薄膜提高了 77.3％.通过场发射扫描电子显微镜(FESEM)和台阶仪研究了 VO2薄膜和VO2-SiO2复合薄膜的损伤形貌差异,VO2薄膜呈现出熔融型损伤,VO2-SiO2薄膜则呈现出熔融型损伤和应力型损伤的共同特征.此外,构建了不同薄膜的激光诱导损伤模型,揭示了相关损伤特性和内在机制.
Abstract
The VO2 and VO2-SiO2 composite films were prepared by sol-gel method.The phase structure and transmittance of films were characterized by X-ray diffraction(XRD)and ultraviolet visible spectrophotometer.The results reveal that the prepared VO2 film is monoclinic phase(B),and the XRD patterns of VO2-SiO2 composite film is similar to that of VO2 film.The optical transmittance of films have reached over 90％within the range of 450 nm to 800 nm.The laser induced damage threshold(LIDT)of VO2-SiO2 composite film is 3.9 J/cm2,which is 77.3％higher than that of VO2 film.The difference in damage morphology between VO2 film and VO2-SiO2 film were studied by FESEM and step analyzer.The VO2 film exhibits melt type damage,while the VO2-SiO2 film exhibits melt type damage and stress damage.In addition,laser-induced damage models for different films were constructed and damage characteristics and underlying mechanisms were discussed.
关键词
VO2/SiO2/溶胶-凝胶法/光学透过率/激光诱导损伤阈值/损伤特性Key words
VO2/SiO2/sol-gel method/optical transmittance/LIDT/damage characteristic引用本文复制引用
基金项目
中国矿业大学教改项目(2023ZDKT05-210)
出版年
2024
国家科技期刊平台
NSTL
万方数据