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VO2-SiO2复合薄膜的激光诱导损伤特性研究

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本文采用溶胶-凝胶法制备了VO2和VO2-SiO2复合薄膜,并用X射线衍射仪(XRD)和紫外-可见分光光度计对薄膜的相结构和透过率进行了表征。结果表明,制备的VO2为单斜相(B),VO2-SiO2复合薄膜的XRD图谱和VO2类似,薄膜在450~800 nm的光学透过率达到了 90%以上。激光诱导损伤阈值(LIDT)测试结果显示,VO2-SiO2复合薄膜的LIDT为3。9 J/cm2,相比VO2薄膜提高了 77。3%。通过场发射扫描电子显微镜(FESEM)和台阶仪研究了 VO2薄膜和VO2-SiO2复合薄膜的损伤形貌差异,VO2薄膜呈现出熔融型损伤,VO2-SiO2薄膜则呈现出熔融型损伤和应力型损伤的共同特征。此外,构建了不同薄膜的激光诱导损伤模型,揭示了相关损伤特性和内在机制。
Laser-Induced Damage Characteristics of VO2-SiO2 Composite Films
The VO2 and VO2-SiO2 composite films were prepared by sol-gel method.The phase structure and transmittance of films were characterized by X-ray diffraction(XRD)and ultraviolet visible spectrophotometer.The results reveal that the prepared VO2 film is monoclinic phase(B),and the XRD patterns of VO2-SiO2 composite film is similar to that of VO2 film.The optical transmittance of films have reached over 90%within the range of 450 nm to 800 nm.The laser induced damage threshold(LIDT)of VO2-SiO2 composite film is 3.9 J/cm2,which is 77.3%higher than that of VO2 film.The difference in damage morphology between VO2 film and VO2-SiO2 film were studied by FESEM and step analyzer.The VO2 film exhibits melt type damage,while the VO2-SiO2 film exhibits melt type damage and stress damage.In addition,laser-induced damage models for different films were constructed and damage characteristics and underlying mechanisms were discussed.

VO2SiO2sol-gel methodoptical transmittanceLIDTdamage characteristic

韩笋、李艳

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中国矿业大学材料与物理学院,徐州 221116

VO2 SiO2 溶胶-凝胶法 光学透过率 激光诱导损伤阈值 损伤特性

中国矿业大学教改项目

2023ZDKT05-210

2024

人工晶体学报
中材人工晶体研究院

人工晶体学报

CSTPCD北大核心
影响因子:0.554
ISSN:1000-985X
年,卷(期):2024.53(10)