Overall design and simulation analysis of high-precision cooling water equipment
High-precision cooling water equipment is an important part of the immersion system of lithography machine,responsible for circulating water temperature control,total flow monitoring and control,process volume collection,monitoring and other functions,so it is urgent to develop high-quality high-precision cooling water equipment.The whole frame structure of high-precision cooling water equipment was designed.In view of the high requirements of the circulating water temperature,the temperature filtering simulation of the water tank was carried out,and the improvement scheme of the water tank design was proposed to ensure that the temperature change at the inlet and outlet of the water tank was in a suitable range.The static analysis of the whole equipment was carried out,and the analysis results showed that the rigid strength of the equipment met the requirements.The studied structure provided a certain reference for the overall structure design of cooling water equipment with high-precision requirements.
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