Research Progress on Preparation of Electronic Grade Phosphoric Acid by Removing Arsenic from Wet-process Phosphoric Acid
The preparation of electronic grade phosphoric acid by deep removing arsenic from wet-process phosphoric acid is an important technical link to develop phosphorus chemical industry with high quality and promote the technological transformation of phosphorus chemical industry.Electronic grade phosphoric acid requires a mass fraction of arsenic less than 1 × 10-7 kg/kg,but because the physicochemical parameters of arsenic and phosphorus are similar,how to achieve the deep separation of arsenic from phosphoric acid has become the key to the preparation of electronic grade phosphoric acid.In this paper,the main international and domestic quality standards for electronic grade phosphoric acid products are systematically reviewed,and the harm of arsenic to electronic grade phosphoric acid etched microelectronic components is summarized.The research progress,advantages and disadvantages of chemical precipitation,crystallization,electrodeposition,electrodialysis and adsorption are summarized,and the development trend of electron grade phosphoric acid prepared by wet phosphoric acid is prospected.
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