Analysis and Research on Dynamic Characteristics of Precision Equipment Anti-micro-vibration Foundation
The electronic process industry is a technology-intensive industry with high input and high output,its precision industrial equipment has strict requirements on the micro-vibration environment,therefore,the anti-microvibration foundation is particularly important.Based on the finite element analysis and engineering measurement method,the influence of the thickness of the foundation plate on the natural frequency,dynamic stiffness and other dynamic characteristics of the anti-micro-vibration foundation structure is analyzed.Combined with the allowable vibration standard of precision equipment,the vibration response of the foundation with different thickness is evaluated,which provides a theoretical basis and process for the design of anti-micro-vibration foundation of precision equipment.
NETL
NSTL
万方数据
维普
