精密设备防微振基台动力特性分析与研究
Analysis and Research on Dynamic Characteristics of Precision Equipment Anti-micro-vibration Foundation
卢爱贞 1娄宇 1许照刚 1陈璠 1吕佐超 1邢云林1
作者信息
- 1. 中国电子工程设计院股份有限公司,北京 100142;北京市微振动环境控制工程技术研究中心,北京 100142
- 折叠
摘要
电子制程产业属于高投入、高产出的技术密集型行业,其精密工业设备对微振动环境要求较严格,因此防微振基台尤为重要.基于有限元分析与工程实测方法,分析基台板厚对防微振基台结构固有频率、动刚度等动力特性的影响,并结合精密设备容许振动标准对不同厚度基台振动响应进行振动评估,为精密设备防微振基台设计提供理论依据和制程.
Abstract
The electronic process industry is a technology-intensive industry with high input and high output,its precision industrial equipment has strict requirements on the micro-vibration environment,therefore,the anti-microvibration foundation is particularly important.Based on the finite element analysis and engineering measurement method,the influence of the thickness of the foundation plate on the natural frequency,dynamic stiffness and other dynamic characteristics of the anti-micro-vibration foundation structure is analyzed.Combined with the allowable vibration standard of precision equipment,the vibration response of the foundation with different thickness is evaluated,which provides a theoretical basis and process for the design of anti-micro-vibration foundation of precision equipment.
关键词
工业厂房/精密设备/防微振基台/动力特性Key words
industrial plants/precision equipment/anti-micro-vibration foundation/dynamic characteristics引用本文复制引用
基金项目
工信部产业基础再造和制造业高质量发展专项(2023)(2023ZY01025)
出版年
2024
NETL
NSTL
维普
万方数据