Behind the brilliant era of integrated circuit development,there is the contribution of Moore's Law,which has guided the industry's development prospects for many years.But as the size and thickness of transistors continue to shrink,silicon materials themselves have approached their physical limits and are no longer applicable to Moore's Law.Therefore,scientists are eager to solve this problem by introducing new materials,including two-dimensional materials.Molybdenum disulfide has attracted much attention due to its special properties,and the large-scale use of molybdenum disulfide requires in-depth research on preparation methods.There are many factors that affect the synthesis of monolayer molybdenum disulfide,such as the amount of reaction source,pressure,substrate,reaction temperature of the two sources,heating rate of the sources,holding time,relative position between molybdenum source and sulfur source substrate,gas flow rate,etc.in the CVD method.In summary,these reaction conditions mainly affect the concentration and reaction rate of sulfur and molybdenum sources at the reaction substrate position.This article summarizes the influence of different conditions on the quality of synthesized monolayer disulfide by CVD and looks forward to its development trend.
new materialsmolybdenum disulfidepreparation methodCVD
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万方数据
维普
