表面改性多孔氧化硅减反射膜的制备及其性能分析
Preparation and Performance Study of Surface Modified Porous Silica Anti-reflective Coating
王逸翔 1肖志葳 1贾红宝 1张子潮 1朱世海1
作者信息
- 1. 辽宁科技大学理学院,辽宁 鞍山 114051
- 折叠
摘要
采用溶胶-凝胶法,以正硅酸乙酯为前驱体,盐酸为催化剂,三嵌段共聚物F127 为模板剂成功制备SiO2 溶胶.采用提拉法在石英基底上镀制SiO2 光学减反膜,通过后嫁接 1H,1H,2H,2H-全氟癸基三乙氧基硅烷对薄膜表面进行改性,提高薄膜的环境稳定性.采用紫外-可见-近红外光谱仪、接触角测量仪及环境稳定性实验分析薄膜的光学性能和耐用性.结果表明,经改性后的薄膜在中心波长 1 600 nm的透射率达到 99.3%,薄膜的水接触角达93°,在 80%相对湿度和 40℃的环境下放置 7d后透射率仅下降 0.5%,接触角仅下降 1.75°,说明薄膜有良好的环境稳定性.
Abstract
SiO2 sol has been successfully synthesized using tetraethyl orthosilicate as a precursor and triblock copolymer surfactant F127 as template with hydrochloric acid as the catalyst.The SiO2 coating was deposited on quartz substrates using the dip-coating method,and film surface modification was carried out by grafting 1H,1H,2H,2H-perfluorodecyltriethoxysilane to improve the environmental stability of the film.The optical properties and durability of the film were investigated using UV-Vis-NIR spectrometer,contact angle tests,and environmental stability experiments.The results show that the transmittance of the modified film at the central wavelength of 1 600 nm reaches 99.3%,and the water contact angle of the film is 93°.After being placed in an environment of 80%relative humidity and 40° for 7 days,the transmittance only decreased by 0.5%and the contact angle only decreased by 1.75°,indicating that the film has good environmental stability.
关键词
溶胶-凝胶法/表面改性/多孔氧化硅/减反射膜/环境稳定性Key words
sol-gel method/surface modification/porous silica/anti-reflective coating/environmental stability引用本文复制引用
基金项目
辽宁省教育厅基本科研项目-面上项目(LJKMZ20220641)
辽宁省教育厅基本科研项目-面上项目(JYTMS20230949)
出版年
2024
NETL
NSTL
万方数据