In this paper,ammonia-nitrogen wastewater,fluoride wastewater,thinning-scratching wastewater,and acid-alkali wastewater from the chipmaking process of an chip semiconductor factory have been researched,and logical wastewater treatment process have been designed,to guarantee wastewater can meet emission standard and provide effective support for stable production in the production workshop.
关键词
半导体/氨氮废水/含氟废水/减薄划片废水/酸碱废水/处理工艺/排放标准
Key words
semiconductor/ammonia-nitrogen wastewater/fluoride wastewater/thinning-scratching wastewater/acid-alkali wastewater/treatment process/emission standard
维普
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