Design and Research on Wastewater Treatment of an Chip Semiconductor Factory
In this paper,ammonia-nitrogen wastewater,fluoride wastewater,thinning-scratching wastewater,and acid-alkali wastewater from the chipmaking process of an chip semiconductor factory have been researched,and logical wastewater treatment process have been designed,to guarantee wastewater can meet emission standard and provide effective support for stable production in the production workshop.
semiconductorammonia-nitrogen wastewaterfluoride wastewaterthinning-scratching wastewateracid-alkali wastewatertreatment processemission standard
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维普
