Research on the Effect of Kovar Alloy Pre-oxidation Process on the Airtightness of Metal Glass Sealing
Kovar alloy and silicon boron glass are tightly combined through the mutual dissolution of oxides on the surface of Kovar alloy with glass.Therefore,the pre oxidation process of Kovar alloy is a key process in metal glass sealing and an important factor that directly affects the airtightness of metal glass sealing.Based on the air pre oxidation method,this paper analyzes the influence of process factors such as pre oxidation temperature,time,and curve on the pre oxidation and sealing shell airtightness of Kovar alloy in air.The results show that the thickness of the oxide layer of Kovar alloy in air increases monotonically with temperature and time.When oxidized in an air atmosphere at 500～550 ℃ for 15～20 minutes,the surface of Kovar alloy forms 0.7～1.6 μm.The thick oxide layer and metal glass sealing shell can achieve high airtightness reliability.
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