Research on the Preparation Process of High Purity Tungsten Powder
High purity APT was studied as the main object,and high-purity tungsten powder suitable for high-purity tungsten sputtering targets was obtained through acid precipitation and two-stage hydrogen reduction processes.Produce high-purity APT into WO3 powder through acid precipitation method.Using WO3 as raw material,high-purity tungsten powder was prepared by two-stage hydrogen reduction method.Perform GDMS purity analysis on the prepared high-purity tungsten powder and compare it with the 5N element standard.It is found that most of the impurity elements are less than the 5N standard,and the overall impurity is less than 0.000 2％,indicating that the prepared tungsten powder meets the purity requirements of 5N grade high-purity tungsten powder.
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维普
