Silicon cores are essential carrier materials for the production of polycrystalline silicon,and it is closely related to the product quality.The packaging assembly line of polycrystalline silicon is equipped with a metal detector.The alarm triggered by silicon cores will halt the production line,severely affecting the packaging efficiency and the normal operation of the production line.This paper studies the relationship between the resistivity,conductive type,weight,bulk metal impurities,magnetic particles,single crystal and polycrystalline structure factors of silicon cores in the alarm of the metal detector,analyzes the significant factors affecting the alarm of silicon cores,and provides data support for controlling the incoming inspection quality of silicon cores.
关键词
硅多晶/硅芯/金属探测仪/电阻率/体金属
Key words
silicon poly-crystalline/silicon cores/metal detector/resistivity/bulk metal impurities
维普
万方数据