A Proposed Calibration Method for Precise Wide Range Scatterometric Measurements
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The co-effect of transmitted power fluctuation and system nonlinearity produce deviations in scatterometer measurement results. An internal calibration method to deal with this problem is proposed. The method can result in more precise scatterometric measurements in a wide range. The basic principle of the method is combining real-transmitted-power detection with the calibration of system nonlinearity. A practical scheme to implement the method is also presented, which is developed based on a special designed mechanism of a microwave radiometer-scatterometer combined system.