高浓度硅烷废气治理系统的应用
Application of High Concentration Silane Tail Gas Treatment System
晋刚1
作者信息
- 1. 上海盛剑环境系统科技股份有限公司(上海 201800)
- 折叠
摘要
介绍了一种治理工业生产过程中产生的高浓度硅烷废气的工艺.先通过补充氮气降低可燃气体体积分数,使其低于爆炸下限,再通过硅烷燃烧筒、除尘器、氨气吸收塔逐步处理各组分,尾气达标排放至烟囱.
Abstract
A process for treating high concentration silane waste gas generated in industrial production processes was introduced.First,reduce the volume fraction of combustible gas to below the lower explosive limit by supplementing nitro-gen.Then,gradually process components through a silane combustion cylinder,dust collector,and ammonia absorption tower.Finally,the tail gas meets the standard is discharged to the chimney.
关键词
硅烷/废气/治理Key words
Silane/Waste gas/Treatment引用本文复制引用
出版年
2024
NETL
NSTL
万方数据