Development and Typical Applications of the Radio Frequency Integrated Microsystem Technology
Moore's law has gradually slowed down,and is approaching its physical limit.However,future radio frequency(RF)systems are still developing towards higher integration,higher performance,higher operating frequency,etc.The RF integrated microsystem technology is one of the core technologies to realize the miniaturization of RF systems.In this paper,the development and typical applications of the RF integrated microsystem technology are introduced.First,the development and current situation of RF microsystems are introduced,focusing on the analysis of the microsystem development process and classic projects of the Defense Advanced Research Projects Agency(DARPA).Second,the technical route and solutions of RF microsystems are summarized.Third,the latest RF integrated microsystem technology is revealed through a series of typical application cases.Finally,the further development ideas for the RF integrated microsystem technology are put forward.