气相色谱与质谱联用在多晶硅生产上的应用进展
Application progress of gas chromatography and its mass spectrometry in polysilicon chemical analysis
何孟 1吴岷贤 1李剑波 1刘涛 1吴加勇1
作者信息
- 1. 四川永祥新能源有限公司分析检测中心 四川 乐山 614802
- 折叠
摘要
多晶硅是推动国家战略能源结构和新能源产业改革,发展太阳能光伏行业的重要原材料.气相色谱技术以其卓越的分离能力和准确的测量结果,在化学分析领域发挥着至关重要的作用.研究综述了气相色谱技术及气质联用技术在多晶硅分析方面的应用进展,介绍了气相色谱的分离机理,并结合具体应用实例对气相色谱及质谱联用技术在多晶硅生产中所涉及方面的应用进行了详细阐述.
Abstract
Polysilicon is an important raw material for promoting the reform of the national strategic energy structure and new energy industry and developing the solar photovoltaic industry.Gas chromatography has become an indispensable part of chemical analysis due to its unique,efficient and fast separation characteristics.A review of the application of gas chromatography-mass spectrometry in polysilicon analysis is presented in this paper,along with a description of the separation process of gas chromatography and a detailed account of its utilization in polysilicon production,based on particular examples.
关键词
气相色谱/联用技术/多晶硅/进展Key words
gas chromatography/combined technology/polysilicon/progress引用本文复制引用
出版年
2024
NETL
NSTL
维普
万方数据