Semiconductor measurement equipment is mainly used to monitor process parameters on the wafer such as film thickness,line width,step height,and resistivity,to achieve accurate control of various device parameters and ensure the overall performance of the device.In order to understand the traceability of semiconductor measurement equipment and achieve unified and accurate measurement values,this study analyzes the key elements of measurement technology in typical semiconductor measurement equipment by studying the measurement techniques of several typical semiconductor measurement equipment such as stylus profiler,ellipsometers,scanning electron microscopes,and four probe testers.A multi-dimensional measurement data model library is constructed to scientifically determine the measurement control cycle and emergency measurement needs of equipment,and a data-based measurement control decision-making mechanism is established to provide precise guarantees for equipment procurement,acceptance,use,and maintenance.
关键词
测量设备/量值准确/计量数据模型库/计量管控决策机制
Key words
measurement equipment/accurate measurement value/measurement data model library/measurement control decision-making mechanism
维普
万方数据