Research on Production Practice of Ultra-high Purity Aluminum Casting for Integrated Circuits
Ultra-high purity aluminum ingot is the key material upstream of sputtering target.Based on the comparative test in production practice,this topic explores the influence of different raw material ratio on the impurity,particulate matter and internal quality of ultra-high purity aluminum ingot,aiming to provide reference for the production of high-quality integrated circuit ultra-high purity aluminum ingot.The production practice results show that cleaning the surface of the remelt is a necessary step.With the increase of the proportion of remelt in the raw material,the number and size of particulate inclusions in aluminum have a trend of increasing and growing,and the proportion of remelt in the raw material should be controlled below 30% in the production practice.
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