O2流量对O2/C2F6等离子体处理的硅油光致发光性能影响
Effect of O2 flow rate on photoluminescence of silicone oil treated by O2/C2F6 plasma
陈天 1钱侬 1袁颖 1叶超1
作者信息
- 1. 江苏省薄膜材料重点实验室,苏州大学物理科学与技术学院,江苏苏州215006
- 折叠
摘要
研究了O2/C2F6等离子体处理的硅油光致发光性能.发光谱覆盖了250～600nm的光谱范围,由290nm、410nm、468nm、481nm、491nm和552nm的6个发光峰组成.O2流量的增大使290nm、410nm、552nm的发光峰增强,468nm的发光峰强度减弱.光致发光性能与等离子体作用导致的氧缺乏中心、C悬挂键、Si悬挂键的形成有关.
Abstract
Photoluminescence of silicone oil treated by O2/C2F6 dual-frequency capacitive coupling plasma was investigated. The photoluminescence of post-treated silicone oil covered the light emission range of 250 -600 nm, including 290 nm, 410 nm, 468 nm, 481 nm, 491 nm and 552 nm emission peaks. It was found that the increase of 02 flow rate led to the increase of 290 nm, 410 nm and 552 nm peaks while the decrease of 468 nm peak. Fourier transformed infrared spectroscopy showed that the photoluminescence correlated with the oxygen deficiency centers, C dangling and Si dangling bonds.
关键词
硅油/光致发光/O2/C2F6等离子体/双频电容耦合放电Key words
photoluminescence/O2/C2F6 plasma/silicone oil/dual-frequency discharge引用本文复制引用
基金项目
国家自然科学基金(10975105)
国家自然科学基金(11075114)
出版年
2012
NETL
NSTL
维普
万方数据