Annealing treatment was carried out on pure titanium foils with thickness of 100 μm at different temperatures.The effect laws of the heat treatment process on the mechanical properties,surface grain morphologies and texture composition of the titanium foils were investigated based on the electron back-scatter diffraction(EBSD)technique.It is found that the average grain size and the texture distri-bution change with the changing of annealing temperature,leading to a consequent change in the elongation of the material.Based on this,the forming experiments with different microchannel heights on the surface of titanium foils by micro rolling technology were carried out,and the relatively ideal microchannels were prepared on the surface of titanium foils with optimal plasticity after annealing.Synthetic char-acterization analysis was conducted on the microchannels using VK-X1000 3D laser scanning confocal microscope.The experiment results show that the internal grains of the titanium foils are completely recrystallized,and the plasticity is greatly enhanced when the annealing temperature reaches 600℃.Meanwhile,it is found that when the microchannel height is 7.5-8.5 μm,not only the overall thickness of the titanium foils does not change before and after rolling,but also the microchannels with high precision can be obtained on the surface of titanium foils.
titanium foilheat treatmentmechanical propertiesmicrochannelsmicro rolling
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