The harmless treatment and resource utilization of the high boiling chlorosilane produced by products in the process of polycrystalline silicon production can be realized by using organic amine cata-lyst.The effects of reaction temperature and catalyst type on the catalytic cracking of high-boiling chlorosi-lane was investigated and the reaction mechanism was analyzed.The results showed that,using N,N-dime-thylbenzylamine as the catalyst,at a reaction temperature of 130～135℃,a reaction time of 1.5 h,and a catalyst amount of 8%,the yield of monosilane product could reach 79.99%.
维普
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