Research on Automatic Detection System of Semiconductor Target Based on Ultrasonic
In order to detect the defects such as oxide impurities,unsoldered and voids in the semiconductor target,and do not cause damage to the product in the testing process,an automatic detection system of semiconductor target using ultrasonic wave is proposed.The system adopts phased array probe for flooding detection,and the detection speed of X-axis and Y-axis in the three-axis moving system reaches 1000mm/s.It can detect small defects such as inclusions,delamination,bubbles and internal cracks in copper,aluminum,cobalt,nickel and other targets,judge the size,location and depth of defects and form a report.The experimental results show that the system can find the defects of the internal equivalent diameter 0.3mm of the target,and has high detection efficiency,stability and reliability.
semiconductor targetultrasonicdefectdetection system