Height Difference Measurement of Hexagonal Chip Wafer Stage Based on Binocular Vision
Aiming at the problem that the wafer stage may affect the detection accuracy in the detection,this paper proposes a measurement method based on binocular vision measurement chip wafer stage.Because there is no ready-made hexagonal chip data set.Therefore,the collected samples are mainly drawn from CAD software to generate an ideal data set,and then the collected data set is trained.The training result value meets the requirements of detection and recognition,and the hexagonal chip is accurately identified.Finally,the YOLOv5s network framework and the global stereo matching algorithm are used to match and measure the same linear edge chip.By calculating the difference,whether there is a height difference is calculated.From the height difference,it can bejudged whether thewafer stageis onthe samehorizontal plane.The experimental results showthatthis method canaccurately detect the height difference of the hexagonal chip wafer stage.
NETL
NSTL
万方数据
