Visualization and in-situ detection of atomic manufacturing processes
Atomic manufacturing refers to the technology that directly applies energy on atoms to precisely and controllably remove or add atoms,thereby manipulating the structures and properties of materials.To achieve the precision and controllability of atomic manufacturing,multi-scale real-time observation and detection are imperative.In-situ transmission electron microscopy technique not only allows real-time study of the relationship between the structures and properties of nanomaterials at the atomic scale,but also enables the construction of atomic-level devices and in-situ detection of their performances.This article focuses on the significant progress made by in-situ transmission electron microscopy technique in the processing,device construction,and in-situ detection at the nanometer/atomic precision level.The article outlines the challenges and future development directions for the visualization and in-situ detection of atomic man-ufacturing processes using current in-situ transmission electron microscopy technique.
atomic manufacturingvisualizationatomic scale processingin-situ detectionin-situ transmission electron microscopenanomaterialreal-time observation