Research progress in in-situ fatigue experiment and performance of micro-and nano-scale materials and structures:a review
With the development towards integration and miniaturization of micromechanical devices such as integrated circuit chips,sensors,flexible circuit systems,and micro-/nano-electromechanical systems,accurate prediction on the mechanical property and reliability of their internal micro-/nano-scale materials has become one of the key issues restricting the further application of the above-mentioned micromechanical devices.During the long-term service,the fatigue properties of micro-/nano-scale materials have become a critical issue in recent years.Firstly,the literature related to the in-situ fatigue experimental methods and fatigue properties of micro-/nano-scale materials was investigated.And then,the current research status of micro-/nano-scale fatigue experimental technology and the research status of in situ fatigue of micro-/nano-scale materials are summarized,including the study of fatigue properties of metals containing twin structure,gradient structure or coarse and fine crystal metals,and uniaxial and multiaxial stress conditions,and the research work on interface fatigue damage is also summarized.Finally,the fatigue properties of micro-/nano-scale materials are prospected,and the future development direction is proposed.
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