High-precision full-field morphology measurement of specular structures is an indispensable step in numerous high-end manufacturing fields.This paper proposes Translational Phase Measuring Deflectometry to achieve high-precision measurement of specular surfaces.Based on a monoscopic single-screen setup,the method establishes a complete model of the relationship between fringe phase,surface gradient,and height,and establishes basic constraints in the model through the assumption of surface continuity.A method for solving model parameters is proposed,addressing the ambiguity issue present in traditional phase measuring deflectometry.This method allows for the measurement of the morphology and pose of the structure under test through simple and arbitrary movements of the screen.A series of validation experiments are conducted to discuss the influence of surface gradient and height variation on the method's ability to measure morphology and validate its comprehensive measurement capability.Experimental results demonstrate a significant improvement in measurement accuracy compared to traditional methods in the measurement of specular structures' morphology.
关键词
镜面测量/全场三维形貌/相位偏折术/单目单屏/条纹
Key words
specular measurement/full-field 3D morphology/phase measuring deflectometry/single-camera single-screen/fringe
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