Research Progress of X-ray Photoelectron Spectroscopy Charge Calibration Methods
In the X-ray photoelectron spectroscopy(XPS)test,there are general errors in the results,the binding energy obtained by the test sample deviates from the actual value due to the influence of environment,instruments,and so on.The commonly used C 1s peak calibration method has limitations in some situations,and even the received spectrogram may be offset or distorted.Therefore,after analyzing the principle of surface charging and the inapplicability of C 1s method,this paper summarizes a variety of charge calibration methods.The conditions in applications of each method are compared,and the advantages and disadvantages are pointed out.