An experimental case using pattern transfer technique based on project is presented to overcome the problems of conventional microelectronic experimental teaching and meet the demand for talent development plan of material major.Research and exploration on the experimental case of graph transfer technology based on project is carried out.Through the discussion of experimental content,exploration,process and ideological and political education are realized.In this course,the electronic materials,the manufacturing equipment and the measuring equipment are applied to build a coherent experimental process.Through this experiment course,students'ability to solve practical problems based on existing knowledge can be improved.Simultaneously,it builds an electronic material practical application platform to promote interdisciplinary and integrated teaching construction.
关键词
图形转移/实践教学/电子材料
Key words
pattern transfer technique/experiment teaching/electronic materials
万方数据