Fabrication of Wearable Flexible Humidity Sensor and Its Application in Human Breathing Pattern Detection
Traditional humidity sensors have the problems of narrow measurement range,long response time and poor stability.In this paper,a capacitive humidity sensor based on graphitic carbon nitride(g-C3 N4)and TiO2 composite is fabricated on the flexible PI substrate.The porous structural and morphological properties of the g-C3 N4/TiO2 composite are analyzed by scanning electron microscope(SEM).The properties of humidity sensitivity,hysteresis,response and recovery rate for the flexible humidity sensor are tested under different humidity conditions and by using saturated salt solution method.The results showed that the g-C3 N4/TiO2 composite thin film humidity sensor has a wide relative humidity detection range(0%～97%RH),low humidity hysteresis(1.48%),and short response time(3.5 s),which can achieve detection of human respiratory rate,respiratory intensity,as well as modes such as bio respiration,tidal respiration and sleep apnea.
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