Development and Application of Rotating Sample Stage Based on Scanning Probe Microscope
When using scanning probe microscopy to characterize the in-plane orientation of anisotropic materials,in-situ rotation of the sample is required,but currently there is no mature solution.Therefore,a multi-layer structure in-situ rotating sample stage and positioning method are developed based on scanning probe microscopy.After completing once axis centering operation with the positioning plate,the sample stage eliminates the need for tedious positioning and adjustment,whether it is replacing a new sample or changing the testing position on the same sample,which greatly improves testing efficiency.In addition,due to the introduction of positioning plates,there is no need to mark the sample or deliberately search for special observation points with obvious characteristics of the sample as a reference during the axial centering operation,which enhances the universality of the sample.Finally,the in-plane and out of plane piezoelectric responses of PbTiO3 thin films are characterized using the rotating sample table,and their three-dimensional ferroelectric domains are reconstructed to provide a more intuitive analysis of domain information.
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