Aiming at the problem that the sample table in the focused ion beam/scanning electron microscope double beam system cannot realize the positioning,imaging and multi-degree-of-freedom machining of rotary micro-feature structures,a high-precision sample rotator driven by stepping motor in vacuum environment is developed.A three-dimensional digital model of the sample rotator is established by NX10.0 computer-aided design software,and the motion simulation of the moving parts is carried out to avoid motion interference during work.The static and dynamic characteristics of its key components are simulated and optimized by ANSYS finite element software,which ensures the working accuracy and intensity requirements of the parts.The maximum rotation speed of the sample rotator is 30 r/min,and the angular resolution reaches 0.001 4°.The developed sample rotator has the characteristics of high precision and simple operation,which provides an important guarantee for the next generation of high-precision three-dimensional micro-nano photonic integrated devices processed by focused ion beam.
关键词
FIB/SEM双束系统/微小特征结构/样品旋转器/有限元分析
Key words
FIB/SEM double beam system/micro feature structure/sample rotator/finite element analysis
维普
万方数据