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Tools performance evaluation for wafer manufacturing

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This article aims to develop an effective method to extract manufacturing inteligence for evaluating manufacturing tool performance to enhance yield and reduce potential loss.

Tool performance evaluationWhitepixelYieldWafer

柯顺魁

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201203 上海华力微电子有限公司 上海

2018

数字化用户

数字化用户

ISSN：
年,卷(期)：2018.24(8)
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