一种三轴硅霍尔传感器的研制
Fabrication and Research of a 3D Silicon Hall Sensors
孙恺 1王明湘1
作者信息
- 1. 苏州大学电子信息学院,江苏苏州215006
- 折叠
摘要
介绍了霍尔传感器的工作原理,针对地磁测量的应用制作了基于十字形结构的硅霍尔传感器,并测试了器件灵敏度。测试结果显示灵敏度与器件工作区的掺杂浓度（NS）成反比,与器件十字形结构的长宽比（L/W）成正向依赖关系。详细介绍了磁集中器的原理及集成工艺,测试结果显示制作的器件实现了三轴测量,且三轴输出与理论预期相符。
Abstract
In this paper, we introduce the work principle of the Hall sensors which are used to measure the magnetic field based on Hall cross. We measure the sensitivity and find that it is inversely proportional to the doping concentration of the active areas. However it increases with the L/W ratio of the Hall cross. We introduce the principle of the integrated magnetic flux concentrator and fabrication processes. After testing, 3D measurement is obtained and the 3D outputs are well agreed with the calculated ones.
关键词
三轴测量/硅霍尔传感器/磁集中器/灵敏度Key words
3 D measurement/silicon Hall sensor/magnetic flux concentrator/sensitivity引用本文复制引用
出版年
2012
NETL
NSTL
维普
万方数据