Fabrication and Research of a 3D Silicon Hall Sensors
In this paper, we introduce the work principle of the Hall sensors which are used to measure the magnetic field based on Hall cross. We measure the sensitivity and find that it is inversely proportional to the doping concentration of the active areas. However it increases with the L/W ratio of the Hall cross. We introduce the principle of the integrated magnetic flux concentrator and fabrication processes. After testing, 3D measurement is obtained and the 3D outputs are well agreed with the calculated ones.
3 D measurementsilicon Hall sensormagnetic flux concentratorsensitivity
NETL
NSTL
万方数据
维普
