铂薄膜电阻温度传感器玻璃密封材料的稳定性能研究
Stability of Glass Seals for Pt Thin-film Resistance Temperature Detector
吴昊 1侯彬 1洪嘉旺 1王耀成 1李志凯 1汪伟 1杜少杰 1李丽 1王晓春1
作者信息
- 1. 江苏理工学院,江苏 常州 213001
- 折叠
摘要
针对铂薄膜电阻温度传感器中绝缘封装过程中存在的气密、绝缘等性能问题,研究了两种玻璃与铂薄膜温度传感器氧化铝基底间浸润性、气密性、绝缘性及热循环稳定性等性能,优选性能最佳的玻璃密封材料应用在铂薄膜温度传感器中.研究结果表明,热稳定性存在差异的SiO2-BaO-Al2O3-CaO系微晶玻璃和SiO2-B2O3-Al2O3-CaO系微晶玻璃在 800℃～1000℃间与氧化铝基底均具有良好的浸润性.SiO2-BaO-Al2O3-CaO系玻璃与SiO2-B2O3-Al2O3-CaO系玻璃密封材料在 800℃、通气压力在 20.7 kPa下的漏气率分别约为 0.0073 sccm·cm-1 和 0.0065 sccm·cm-1,绝缘电阻率分别约为 21.6×106 Ω·cm和 31.1×106 Ω·cm.此外,在 30℃～800℃热循环 500 次后,两种玻璃表面出现尺寸不一的孔洞,其中,SiO2-BaO-Al2O3-CaO玻璃经历 500 次热循环后孔洞尺寸由 0.13 μm增至 15.62 μm,而SiO2-B2O3-Al2O3-CaO系玻璃孔洞尺寸变化较小,表面形貌较为致密.以上研究结果表明,SiO2-B2O3-Al2O3-CaO系玻璃具有更加优异的密封性能、高温绝缘性能及热循环稳定性,更适合用于铂薄膜电阻温度传感器的封装工艺.
Abstract
Noting the airtight,insulation and other performance issues of platinum thin-film resistance temperature sensors in the insulation encapsulation process,two kinds of glass and platinum thin-film temperature sensors were evaluated,focusing on the infiltration of the performance,airtightness,insulation and thermal cycling stability,so as to optimize the performance of the glass sealing materials for the platinum thin-film temperature sensors.The two glass-ceramics,SiO2-BaO-Al2O3-CaO glass and SiO2-B2O3-Al2O3-CaO glass,with different thermal stability,have high wettability with the alumina substrate at 800-1000℃.At 800℃,the air leakage rates were about 0.0073 sccm·cm-1 and 0.0065 sccm·cm-1,at the vent pressure of 20.7 kPa,while the insulation resistivities were about 21.6×106 Ω·cm and 31.1×106 Ω·cm,respectively.In addition,the size of holes on the surfaces of the two types of glass appeared to be different after 500 thermal cycling from 30 to 800℃.Specifically,the pore size of the SiO2-BaO-Al2O3-CaO glass increased from 0.13 μm to 15.62 μm after 500 thermal cycles,whereas that of the SiO2-B2O3-Al2O3-CaO glass showed a smaller change and the surface morphology was more denser.It is therefore concluded that the SiO2-B2O3-Al2O3-CaO glass has more excellent sealing performance,high-temperature insulation performance and thermal cycle stability,and hence is more suitable for the encapsulation process of platinum thin-film resistance temperature sensors.
关键词
铂薄膜电阻温度传感器/玻璃密封材料/浸润性能/密封性能/绝缘性能/热循环稳定性Key words
platinum thin-film resistance temperature sensors/glass seals/wetting property/air tightness/insulation resistance/thermal cycle stability引用本文复制引用
基金项目
国家自然科学基金(52202094)
江苏省产业项目(CJ20210122)
前瞻与关键核心技术攻关(BE2023092-1)
常州市应用基础研究江苏省产学研合作项目(BY2022789)
出版年
2024
国家科技期刊平台
NSTL
万方数据