首页|铂薄膜电阻温度传感器玻璃密封材料的稳定性能研究

铂薄膜电阻温度传感器玻璃密封材料的稳定性能研究

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针对铂薄膜电阻温度传感器中绝缘封装过程中存在的气密、绝缘等性能问题,研究了两种玻璃与铂薄膜温度传感器氧化铝基底间浸润性、气密性、绝缘性及热循环稳定性等性能,优选性能最佳的玻璃密封材料应用在铂薄膜温度传感器中.研究结果表明,热稳定性存在差异的SiO2-BaO-Al2O3-CaO系微晶玻璃和SiO2-B2O3-Al2O3-CaO系微晶玻璃在 800℃～1000℃间与氧化铝基底均具有良好的浸润性.SiO2-BaO-Al2O3-CaO系玻璃与SiO2-B2O3-Al2O3-CaO系玻璃密封材料在 800℃、通气压力在 20.7 kPa下的漏气率分别约为 0.0073 sccm·cm-1 和 0.0065 sccm·cm-1,绝缘电阻率分别约为 21.6×106 Ω·cm和 31.1×106 Ω·cm.此外,在 30℃～800℃热循环 500 次后,两种玻璃表面出现尺寸不一的孔洞,其中,SiO2-BaO-Al2O3-CaO玻璃经历 500 次热循环后孔洞尺寸由 0.13 μm增至 15.62 μm,而SiO2-B2O3-Al2O3-CaO系玻璃孔洞尺寸变化较小,表面形貌较为致密.以上研究结果表明,SiO2-B2O3-Al2O3-CaO系玻璃具有更加优异的密封性能、高温绝缘性能及热循环稳定性,更适合用于铂薄膜电阻温度传感器的封装工艺.
Stability of Glass Seals for Pt Thin-film Resistance Temperature Detector
Noting the airtight,insulation and other performance issues of platinum thin-film resistance temperature sensors in the insulation encapsulation process,two kinds of glass and platinum thin-film temperature sensors were evaluated,focusing on the infiltration of the performance,airtightness,insulation and thermal cycling stability,so as to optimize the performance of the glass sealing materials for the platinum thin-film temperature sensors.The two glass-ceramics,SiO2-BaO-Al2O3-CaO glass and SiO2-B2O3-Al2O3-CaO glass,with different thermal stability,have high wettability with the alumina substrate at 800-1000℃.At 800℃,the air leakage rates were about 0.0073 sccm·cm-1 and 0.0065 sccm·cm-1,at the vent pressure of 20.7 kPa,while the insulation resistivities were about 21.6×106 Ω·cm and 31.1×106 Ω·cm,respectively.In addition,the size of holes on the surfaces of the two types of glass appeared to be different after 500 thermal cycling from 30 to 800℃.Specifically,the pore size of the SiO2-BaO-Al2O3-CaO glass increased from 0.13 μm to 15.62 μm after 500 thermal cycles,whereas that of the SiO2-B2O3-Al2O3-CaO glass showed a smaller change and the surface morphology was more denser.It is therefore concluded that the SiO2-B2O3-Al2O3-CaO glass has more excellent sealing performance,high-temperature insulation performance and thermal cycle stability,and hence is more suitable for the encapsulation process of platinum thin-film resistance temperature sensors.

platinum thin-film resistance temperature sensorsglass sealswetting propertyair tightnessinsulation resistancethermal cycle stability

吴昊、侯彬、洪嘉旺、王耀成、李志凯、汪伟、杜少杰、李丽、王晓春

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江苏理工学院,江苏 常州 213001

铂薄膜电阻温度传感器 玻璃密封材料 浸润性能 密封性能 绝缘性能 热循环稳定性

国家自然科学基金江苏省产业项目前瞻与关键核心技术攻关常州市应用基础研究江苏省产学研合作项目

52202094CJ20210122BE2023092-1BY2022789

2024

10.13957/j.cnki.tcxb.2024.02.006

陶瓷学报
景德镇陶瓷学院

陶瓷学报

CSTPCD北大核心
影响因子：0.7
ISSN：1000-2278
年,卷(期)：2024.45(2)
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