首页|Al2O3-AlN复相陶瓷的热化学形变行为与预应力强化

Al2O3-AlN复相陶瓷的热化学形变行为与预应力强化

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Al2O3-AlN复相陶瓷在电子信息领域具有广阔的应用前景,为了保证其服役安全性与可靠性,采用热化学形变调控下的后处理强化技术,提高复相陶瓷的力学性能;并利用非接触式原位形变测量、SEM-EDS、XRD、压痕试验等表征方法,探讨了复相陶瓷的热化学形变行为、物相—微观结构演变规律以及后处理的预应力强化机制.结果显示,随着后处理温度的升高,Al2O3-AlN复相陶瓷的弯曲强度呈现先增后降的变化规律;其中,1100 ℃处理制得的试样弯曲强度达到极大值[(519.23±23.87)MPa],较未处理试样提高了15%,而且后处理并未降低复相陶瓷试样的热导率.后处理过程可以使复相陶瓷中的AlN组分发生表层局部氧化,并伴随体积膨胀,继而通过表层—内芯的热化学形变失配在复相陶瓷表面形成残余压应力,增大了陶瓷试样的裂纹扩展阻力,从而有效提升了复相陶瓷的力学强度;然而,当后处理温度超过1200 ℃时,表面氧化层易形成气孔和微裂纹缺陷,导致复相陶瓷力学强度的降低.
Thermochemical Deformation Behavior and Pre-stressed Strengthening of Al2O3-AlN Composite Ceramics
Al2O3-AlN composite ceramics have a wide range of applications in the field of electronic information.In order to ensure their service safety and reliability,the post-treatment reinforcement technique under the thermochemical deformation control was used to enhance mechanical properties of the composite ceramics.Non-contact in-situ deformation measurements,SEM-EDS,XRD and indentation tests were used to study thermochemical deformation behavior,phase-microstructure evolution and the prestress reinforcement mechanisms of the Al2O3-AlN composite ceramics.It is indicated that flexural strength of the Al2O3-AlN composite ceramics first increased and then decreased with increasing post-treatment temperature.Specifically,flexural strength of the sample post-treated at 1100 ℃ reached a maximum value of(519.23±23.87)MPa,which is 15%higher than that of the untreated sample.Meanwhile,thermal conductivity of the composite ceramics was not reduced by the post-treatment.The post-treatment process caused localized surface oxidation of AlN in the composite ceramics,accompanied by the volume expansion.Subsequently,residual compressive stress was produced on surface of the composite ceramics through the external and internal thermochemical deformation mismatch,which is favorite to the increasement of crack propagation resistance and the effective enhancement of mechanical strength of the composite ceramics.However,when the post-treatment temperature exceeds 1200 ℃,pores and microcracks were formed on the surface oxide layer,leading to a decrease in the mechanical strength of the composite ceramics.

Al2O3-AlN composite ceramicsthermochemical deformationpre-stressed strengtheningin-situ deformation measurementmicrostructure

刘泽校、聂光临、严政清、刘一军、林华泰、左飞

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广东工业大学机电工程学院,广东 广州 510006

蒙娜丽莎集团股份有限公司,广东佛山 528211

广东省大尺寸陶瓷薄板企业重点实验室,广东佛山 528211

Al2O3-AlN复相陶瓷 热化学形变 预应力强化 原位形变测量 微观结构

2024

陶瓷学报
景德镇陶瓷学院

陶瓷学报

CSTPCD北大核心
影响因子:0.7
ISSN:1000-2278
年,卷(期):2024.45(6)