不同金属镀层单晶硅靶板的冲击受力特性
Monocrystalline Silicon Target Plates Impact Force Characteristics with Different Metal Coatings
代锋琪 1刘双杰 1郝永平 2刘凤丽3
作者信息
- 1. 沈阳理工大学装备工程学院,辽宁 沈阳 110159
- 2. 沈阳理工大学装备工程学院,辽宁 沈阳 110159;沈阳理工大学机械工程学院,辽宁 沈阳 110159
- 3. 沈阳理工大学机械工程学院,辽宁 沈阳 110159
- 折叠
摘要
为了探究金属镀层对单晶硅靶板抗冲击性能的影响,建立了金属/单晶硅复合靶板理论分析模型,分析讨论了单晶硅靶板表面的最大应力与镀层材料动态屈服应力的关系,应用有限元法在 LS-DYNA 软件中对金属/单晶硅复合靶板进行瞬态动力学计算,得到了不同金属镀层单晶硅靶板冲击受力后的力学响应.根据实验结果总结得到金属镀层对单晶硅靶板冲击受力具有一定的抗冲击效果,能够延迟和减弱出现在靶板正、背面的应力峰值,减小在靶板上产生的应力.
Abstract
In order to investigate the influence of metal coating on the impact resistance of monocrystalline sili-con target plate,a theoretical analysis model of metal/monocrystalline silicon composite target plate was estab-lished,the relationship between the maximum stress on the surface of monocrystalline silicon target plate and the dynamic yield stress of the coating material was analyzed and discussed,the transient dynamics calculation of metal/monocrystalline silicon composite target plate was carried out in LS-DYNA software by applying the finite element method,and the mechanical response of monocrystalline silicon target plate with different metal coatings after impact was obtained.The mechanical response of the single-crystal silicon target plate with different metal coatings was obtained after being stressed.Based on the experimental results,it was concluded that the metal coating had a certain anti-impact effect on the impact stress of single-crystal silicon target plate,which could de-lay and weaken the stress peaks appearing on the front and back of the target plate and reduce the stress genera-ted on the target plate.
关键词
单晶硅/复合靶板/理论分析模型/动态屈服应力/动力学Key words
monocrystalline silicon/composite target plate/theoretical analysis model/dynamic yield stress/dynamics引用本文复制引用
基金项目
沈阳理工大学"光选学者"计划项目()
辽宁省教育厅基金(LJKMZ20220601)
出版年
2024
NETL
NSTL
万方数据