Monocrystalline Silicon Target Plates Impact Force Characteristics with Different Metal Coatings
In order to investigate the influence of metal coating on the impact resistance of monocrystalline sili-con target plate,a theoretical analysis model of metal/monocrystalline silicon composite target plate was estab-lished,the relationship between the maximum stress on the surface of monocrystalline silicon target plate and the dynamic yield stress of the coating material was analyzed and discussed,the transient dynamics calculation of metal/monocrystalline silicon composite target plate was carried out in LS-DYNA software by applying the finite element method,and the mechanical response of monocrystalline silicon target plate with different metal coatings after impact was obtained.The mechanical response of the single-crystal silicon target plate with different metal coatings was obtained after being stressed.Based on the experimental results,it was concluded that the metal coating had a certain anti-impact effect on the impact stress of single-crystal silicon target plate,which could de-lay and weaken the stress peaks appearing on the front and back of the target plate and reduce the stress genera-ted on the target plate.
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