A Zigzag Groove Optimization Based on Taguchi Method
Aiming at the problem of inefficiency and limitation of traditional zigzag groove mechanism in the de-sign stage,by exploring the influence law of different design parameters on mass displacement of plane zigzag groove,an optimization design method was proposed.Taguchi method was used to analyze the five parameters(zigzag groove width,zigzag groove Angle,zigzag groove length,zigzag groove intercrossing clearance and an-chor groove clearance)affecting the maximum displacement of the mass block of plane zigzag groove under four levels,and constructed the orthogonal table of five factors and four levels for test analysis.Through the simula-tion calculation based on finite element method,the corresponding maximum displacement of mass block was ob-tained according to different dimension parameter combinations.Finally,the important factors affecting the out-put response were selected by signal-to-noise ratio analysis and variance analysis,and the optimal design parame-ter combination was obtained by comprehensive analysis.Finite element simulation was carried out on the opti-mized parameter combination.In the simulation results,the maximum displacement of mass block in the optimi-zation scheme was increased by46.35%from 1 331μmto 1 948μm.The experimental results showed thatthe maximum displacement of mass block reaches 1 800 μm under launch load and less than 1 000 μm under service load,which met the design requirements.It provided theoretical and experimental guidance for the optimization design of MEMS planar zigzag groove mechanism.
planar tortuous grooveparameter designtaguchi methodfinite element simulation
NETL
NSTL
万方数据
维普
