Generalized Ellipsometry Double Compensator Arbitrary Proportional Rotation Control System
Aiming at the problem of the single control rotation ratio of the double rotation compensator of the general-ized ellipsometry at present,a set of arbitrary proportion rotation control system of the double rotation compensator of the generalized ellipsometry based on STM32 and stepping motor was proposed.In this system,stm32f1 was used to program the basic speed,speed ratio and rotation optical cycle number of two stepper motors,and Labview was used to program the upper computer control system to complete the arbitrary proportional rotation control of the double com-pensator.The generalized ellipticity experiment system was built to collect the images of air samples measured at differ-ent speed ratios,and the data acquisition results of 5∶3 speed ratio were normalized with the theoretical air sample waveform.The results showed that the maximum error between the actual air Muller matrix and the theoretical Muller matrix elements was 0.014,and the average error was 0.004 3.It was verified that the system had high reliability and measurement accuracy.
generalized ellipsometrydouble rotation compensatorspeed controlcontrol system
NETL
NSTL
万方数据
维普
