MEMS Pneumatic Control Microsystem for Microgram Aircraft
Aiming at the requirement of pico air vehicle for millimeter level control systems,a new design scheme for pneumatic control microsystems was proposed with MEMS technology.By utilizing the cumulative effect of peristaltic electrodes,the control system achieves a good balance between force and volume,achieving the goal of achieving high driving force in a small volume.The structural design was completed through theoreti-cal analysis and size optimization,and finite element simulation analysis was conducted on it.The simulation re-sult showed that the final designed microsystem area was 22 mm×12 mm,which could generate a driving force of 433 mN and enable the control surface to achieve angle adjustment within the range of 12 degree deviation angle.
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维普
