MOEMS Optical Logic Switch Status Monitoring System
In order to improve the response speed of MOEMS optical logic switch and reduce the influence of long-term accumulation on laser ignition system,a status monitoring system was embed in the electro-thermal MOEMS optical switch.The monitoring system included status monitoring units,drive circuits,control cir-cuits,and status monitoring circuits,etc.By setting the status monitoring units on the moving path of the micro electro thermal actuators,when the micro electro thermal actuator moved to contact with the status monitoring unit,the status monitoring circuit recognized the contact signal and output the trigger signal,thus realizing the rapid switching of the optical logic switch.The principle prototype of the status monitoring system was made for a kind of electro-thermal MOMES optical logic switch,and verified by experiments.The results showed that the system could accurately identify the travel status of the micro electro-thermal actuators,and the response time of the optical logic switch to the positive and reset state was less than 90 ms.
MOEMSlaser ignitionoptical logic switchstatus monitoring system
万方数据
维普
