The development of hydrogen energy is in full swing,and technologies such as hydrogen fuel cells and high-pressure hydrogen storage are booming.However,the development of hydrogen sensors is relatively lagging behind.The main reason is that it is difficult to obtain sensitive films with both small grain size and high porosity using existing preparation methods.This paper uses supersonic expansion cluster beam deposition technology to prepare highly porous tin oxide films,and studies the effect of annealing temperature on its surface morphology,crystallinity,grain size and chemical composition.The results show that the as-deposited sample has low oxygen content and is unresponsive to hydrogen.The 250 ℃ annealed sample is an amorphous film and maintains a high degree of porosity,so it responds fastest to hydrogen and has the highest magnitude of response,but the resistance is too high to be used in real applications.There are too many oxygen species adsorbed on the surface of the sample annealed at 500 ℃,resulting in poor hydrogen sensing performance.The 750 ℃ annealed sample has the best overall performance,and the hydrogen sensing performance can be further improved under high humidity,so it is particularly suitable for use as a hydrogen safety sensor in hydrogen fuel cell vehicles.
维普
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