脉冲偏压占空比对电弧离子镀AlCrSiN涂层结构和性能的影响
Effects of pulsed bias duty cycles on structure and properties of the AlCrSiN coatings
白乌力吉 1刘艳梅 1张蕊 1王重阳 1许梦娇 1尹霜 1王铁钢1
作者信息
- 1. 天津职业技术师范大学天津市高速切削与精密加工重点实验室,天津 300222
- 折叠
摘要
为优化电弧离子镀AlCrSiN涂层的制备工艺,获得最佳的脉冲偏压占空比,采用全自动脉冲电弧离子镀技术,在不同脉冲偏压占空比下分别制备AlCrSiN涂层,利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、划痕仪、球-盘式摩擦磨损试验机等对涂层物相组成、表面形貌、力学性能及摩擦学行为进行表征.结果表明:当脉冲偏压占空比从 60%上升到80%时,制备的AlCrSiN涂层表面微坑缺陷和大颗粒数量逐渐减少,涂层结构变得更加致密;当脉冲偏压占空比增大到90%时,涂层表面粗糙度增加.当脉冲偏压占空比为 70%时,AlCrSiN涂层硬度最高,约为 11.35 GPa;当脉冲偏压占空比为 80%时,涂层临界载荷Lc3 达最大值 98.5 N.当脉冲偏压占空比为 80%时,涂层摩擦系数最低,约为 0.50.涂层磨损率随脉冲偏压占空比增加,先上升后下降,当脉冲偏压占空比为60%时,制备的AlCrSiN涂层磨损率最低,约3.21×10-3 μm3/(N·μm).经比较,当脉冲偏压占空比为70%时,制备的涂层具有最佳的综合性能.
Abstract
To optimize the preparation process of arc ion plating AlCrSiN coatings and obtain the best pulsed bias duty cycles,the automatic pulsed arc ion plating technology was employed to prepare AlCrSiN coatings at different pulsed bias duty cycles.The phase constituent,surface morphology,mechanical properties,and tribological behaviors of the different coatings were characterized by X-ray diffractometer(XRD),scanning electron microscope(SEM),scratch tester,and ball-on-disc tribometer,etc.The results show that as the pulsed bias duty cycle increased from 60%to 80%,the amount of micro-pit defects and large particles on the surface of the prepared AlCrSiN coatings decreased gradually,and the coating structure became denser;as the pulsed bias duty cycle increased to 90%,the surface rough-ness of the coatings increased significantly;the hardness of AlCrSiN coating was highest at a pulsed bias duty cycle of 70%,approximately 11.35 GPa;the critical load Lc3 of coatings reached the maximum value of 98.5 N at a pulsed bias duty cycle of 80%;the coating friction coefficient was lowest at a pulsed bias duty cycle of 80%,around 0.50;with the increase of pulsed bias duty cycle,the wear rate first increased and then decreased;the wear rate of resulted AlCrSiN coating was the lowest,about 3.21×10-3 μm3/(N·μm)at a pulsed bias duty cycle of 60%.Comparatively,the coating prepared at a pulsed bias duty cycle of 70%exhibited the best overall performance.
关键词
全自动电弧离子镀/AlCrSiN涂层/脉冲偏压占空比/微观结构/力学性能/摩擦性能Key words
automatic arc ion plating/AlCrSiN coating/pulse bias duty ratio/microstructure/mechanical properties/fric-tional property引用本文复制引用
基金项目
天津市多元投入基金重点项目(22JCZDJC00670)
天津市教委科研重点项目(2022ZD020)
出版年
2024
NETL
NSTL
万方数据