[Purpose/Significance]Constructing an innovative and multi-layered key core technology research system helps seize the initiative in technological development and grasp crucial opportunities for technological breakthroughs.[Method/Process]This paper adopted the Word2Vec model for text vectorization and utilized the CFDP algorithm to identify core technologies.It employed structural hole analysis to recognize key core technol-ogies and constructed a patent citation network.The Critical Path Method(CPM)was applied to explore the sig-nificant pathways of technological development,presenting a systematic method for key core technology research.[Result/Conclusion]Using chip lithography as a case study,this paper validates the feasibility of the proposed method system in the identification and path analysis of key core technologies.Through the examination of existing national policies,the empirical results are found to be reasonable,further confirming the practicality and effective-ness of the method system.