太原理工大学学报2025,Vol.56Issue(1) :137-147.DOI:10.16355/j.tyut.1007-9432.20240388

基于改进YOLOv7-Tiny的轻量化激光器芯片缺陷检测算法

A Lightweight Laser Chip Defect Detection Algorithm Based on Improved YOLOv7-Tiny

胡玮 赵菊敏 李灯熬
太原理工大学学报2025,Vol.56Issue(1) :137-147.DOI:10.16355/j.tyut.1007-9432.20240388

基于改进YOLOv7-Tiny的轻量化激光器芯片缺陷检测算法

A Lightweight Laser Chip Defect Detection Algorithm Based on Improved YOLOv7-Tiny

胡玮 1赵菊敏 1李灯熬2
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作者信息

  • 1. 太原理工大学电子信息工程学院,山西 太原;太原理工大学大数据融合分析与应用山西省重点实验室,山西 太原;太原理工大学山西省智能感知工程研究中心,山西 太原
  • 2. 太原理工大学计算机科学与技术学院(大数据学院),山西 太原;太原理工大学大数据融合分析与应用山西省重点实验室,山西 太原;太原理工大学山西省智能感知工程研究中心,山西 太原
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摘要

[目的]高功率半导体激光器的光学灾变损伤是限制其可靠性和寿命的主要因素,因此,有效的缺陷检测对于优化激光器芯片的制造工艺和结构设计至关重要.提出了一种基于改进YOLOv7-Tiny的轻量化激光器芯片缺陷检测算法,旨在解决深度学习应用于缺陷检测时面临的高计算量和参数量问题.[方法]利用轻量化卷积神经网络替换特征提取主干有效减少对计算资源消耗,有效提取电致发光图像中缺陷特征.为从上下文特征获取更丰富的信息,引入多分支重参数化卷积块重构聚合模块,通过多路径分支丰富特征表示,训练与推理的解耦保证检测效率.此外,结合坐标注意力,提升定位精度.进行了剪枝实验和模型部署,验证算法的初步应用.[结果]在电致发光缺陷数据集上的实验结果显示,本文方法能在较低的参数和计算量下准确地检测出芯片缺陷,展现出良好的性能.

Abstract

[Purposes]Catastrophic Optical Damage(COD)is a major limiting factor for the reli-ability and lifespan of high-power semiconductor lasers,making effective defect detection crucial for optimizing the manufacturing processes and structural designs of laser chips.In this study,a light-weight laser chip defect detection algorithm based on an improved YOLOv7-Tiny is proposed,aim-ing at addressing the high computational and parameter demands of deep learning applications in defect detection.[Methods]By employing a lightweight convolutional neural network as the feature extrac-tion backbone and integrating multi-branch reparameterized convolution blocks,this algorithm not only significantly reduces resource consumption but also enhances feature representation capabilities.Additionally,the introduced coordinate attention mechanism improves the precision of defect localiza-tion.Pruning experiments and model deployment are conducted to further verify the algorithm practi-cality.[Findings]Experimental results on the electroluminescence dataset demonstrate that this method can accurately detect chip defects with lower parameter and computational costs,showing ex-cellent performance.

关键词

光学灾变损伤/半导体激光器芯片/缺陷检测/轻量化/模型剪枝

Key words

catastrophic optical damage/semiconductor laser chip/defect detection/lightweight/model pruning

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出版年

2025
太原理工大学学报
太原理工大学

太原理工大学学报

北大核心
影响因子:0.476
ISSN:1007-9432
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