RESEARCH ON EL BLACK EDGE AND CORNER IMPROVING OF TOPCon SOLAR CELLS WITH LPCVD TECHNOLOGY ROUTE
EL black edges and corners are the key and difficult issues encountered by TOPCon solar cells when using LPCVD technology.They not only lead to a decrease in photoelectric conversion efficiency and yield,but also result in uneven brightness of EL images inside the solar cell.In order to improve the EL black edge and corner problems,this paper analyzes and studies the EL black edge and black corner problems when TOPCon solar cells adopt the LPCVD technology route.The research results indicate that the EL black edge and black corner problems on the TOPCon solar cell production line are mainly caused by the uneven superposition of the gas field of the first boat in the LPCVD equipment and the natural oxide layer of alkali throwing.By optimizing the LPCVD automated boat release program and adjusting the oxygen soaking time,the EL black edge,black corner,EL quartz boat print,and EL oxidation dirt phenomenon have all been significantly improved.The improvement of EL black edge and black corner is 0.45%,and the proportion of high-temperature EL defects has been improved by 3.04%.
TOPCon solar cellsLPCVDEL black edge and cornerquartz boat groove contaminated EL problem
国家科技期刊平台
NSTL
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