STUDY ON EL DEFECTS CAUSED BY DEFECT OF STUCK POINT POSITION IN BACK PASSIVATION PROCESS OF PERC SOLAR CELLS
Absrtact:In this paper,the abnormal EL blackening quality of graphite boat hollow stuck point occurred in the process of two-in-one tube PECVD back passivation coating was studied.The influences of RF power,process temperature and Al2O3 deposition thickness on the abnormal blackening quality of hollow stuck point EL of crystalline silicon solar cells in two-in-one tube PECVD back passivation process were analyzed and discussed.The results show that,in two-in-one tube PECVD back passivation process,when an aluminum oxide film with a thickness of 12-16 nm and a pre-deposition process temperature of 350-370℃ are used,it can effectively improve and solve that abnormal black quality of the EL of the hollow stuck point of the coating can be improved effectively,the coating quality of crystalline silicon solar cells in two-in-one tube PECVD is significantly elevated.
solar cellEL blackdorsal passivationpredepositiontwo-in-one tubular PECVDstuck point passivation defect
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