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柔性有机铁电栅石墨烯场效应晶体管的制备与特性研究

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针对柔性场效应晶体管直接在柔性衬底上进行器件制备时的机械损伤问题,提出一种基于无损转移法的柔性有机铁电栅石墨烯场效应晶体管制备方法.器件的微纳加工过程完全在刚性衬底上完成,再通过液相法转移到柔性衬底上,可以有效避免器件制备过程引入的应力对性能的损伤.实验结果表明,转移至PET衬底上的柔性有机铁电栅石墨烯场效应晶体管仍具有典型的铁电滞回特性,且滞回窗口大于20 V.经过1000次弯折之后,器件的滞回窗口仅有约14%的降低,证明了所制备柔性石墨烯晶体管器件具有优异的耐弯折特性.本研究可为柔性可穿戴电子系统的研制提供研究方案与解决问题的思路.
Preparation and Characterization of Flexible Organic Ferroelectric-Gate Graphene Field-Effect Transistors
To address the mechanical damage issue during direct device fabrication of flexible field-effect transistors on flexible substrates,a fabrication method for flexible organic ferroelectric-gate graphene field-effect transistors based on damage-free transfer is proposed.The micro-nano processing of the device is completely performed on rigid substrates before being transferred to flexible substrates through a liquid-phase method,which can effectively avoid performance degradation caused by stress introduced during device fabrication.Experimental results show that the flexible organic ferroelectric-gate graphene field-effect transistors transferred to PET substrates still maintain typical ferroelectric hysteresis characteristics,with a hysteresis window greater than 20V.After 1000 bending cycles,the device's hysteresis window shows only about 14%reduction,demonstrating excellent bending durability of the prepared flexible graphene transistor devices.This research provides research schemes and problem-solving approaches for the deve-lopment of flexible wearable electronic systems.

GrapheneFerroelectric gateFlexible field-effect transistorHysteresis characteristics

刘思成、谢丹

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清华大学集成电路学院,北京 100084

石墨烯 铁电栅 柔性场效应晶体管 滞回特性

2024

微处理机
中国电子科技集团公司第四十七研究所

微处理机

影响因子:0.183
ISSN:1002-2279
年,卷(期):2024.45(6)