Microwave Power Detection Chip Based on Multi MEMS Beams
To optimize the microwave performance of MEMS microwave power detection chips and enhance their preparation reliability,this study established an S-parameter model for an online MEMS micro wave power detection chip with a cantilever beam structure.The impact of the number of cantilever beams on the microwave performance of the microwave power detection chip was investigated.Theoretical derivation and simulation were conducted to analyze the micro wave performance of multi-beam structure micro wave power detection chips.Additionally,single-beam and double-beam structure MEMS microwave power detection chip samples were prepared for testing.The results reveal that in the frequency range of 8-12 GHz,the reflection loss of the microwave power detection chip with a single-beam structure is less than-27 dB,whereas the reflection loss of the microwave power detection chip with a double-beam structure is less than-18.5 dB.The trend of transmission characteristics changes of the single-and double-beam microwave power detection chips is consistent with the theoretical values,validating the accuracy of the S-parameter model.
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