Harsh Environment Resistance of Parylene Used to Protect ICs
Parylene can be widely used in integrated circuits based on its special properties of moisture resistance,gas isolation,and electrical insulation.In this study,we evaluated the resistance of parylene to harsh environments in terms of material degradation under the conditions of thermal oxygen aging,ultraviolet aging,and thermal cycle and life tests.The results of the thermal-oxidative aging and ultraviolet aging tests demonstrate that parylene should not be exposed to such environments because degradation could easily occur.However,the degradation of parylene is unnoticeable under the conditions of thermal cycle and life tests.Furthermore,the results demonstrate that the breakdown resistance is related only to the thickness of the deposited layer and the correlation is positive.
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