Manufacturing technology is the foundation and driving force for improving the overall performance of integrated circuits(ICs).Analog ICs,which form the bridge between electronic systems and analog information,are characterized by high design complexity,a wide application range,a long application cycle,and low substitutability.Therefore,technologies for the manufacturing analog ICs require high voltage,high speed,high precision,and diversified device integration,combining different product requirements and process characteristics to form a unique development path for the industry.In this study,advances in the manufacturing technology for modern analog ICs are reviewed.The technical features and developing trends of complementary bipolar,BiCMOS,BCD,and RF/mixed-signal CMOS processes from industry's leading integrated device manufacturers and foundries are analyzed in detail to provide a reference for the research and development of high-performance analog ICs.
关键词
模拟集成电路/制造工艺/SiGe/BiCMOS/BCD/RF/CMOS
Key words
analog integrated circuits/manufacturing technology/BiCM OS/BCD/RF CMOS
维普
万方数据